| Specifications | |
| Maximum diameter | 1200mm |
| Degree of vacuum | MIN:2Pa |
| Minimum detectable leak rate | 5×10-13 Pa•m3/s |
Maximum diameter: 1200mm
Vacuum degree: 2Pa
Minimum detectable leak rate: 5 × 10-13 Pa • m3/s
T/CATSI 02010-2022 "Gas tightness helium leak detection method"